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Si V-Grooves

Custom silicon v-groove products

Figure 1.Vega Wave Systems can produce v-groove substrates for custom applications. For example, our silicon v-groove products can serve as a substrate for single or multi-mode MT ferrules, consisting of an array of twelve precision-etched v-grooves with a 250 ± 1μm pitch for optical fiber placement and two deeply etched v-grooves separated by 2.3mm for MT alignment pin placement. The v-groove array is centered between the two deep-etched grooves to within ± 1μm. Other capabilities include the ability to combine the precision v-grooves with contact trace metalization on float-zone silicon for high speed applications and solder deposition and bumping for flip-chip optoelectronic applications. Please contact the factory for further information.

Application Note for silicon v-groove design


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