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Equipment and Facilities

Vega Wave Systems’ facilities have been assembled to support the company’s core competence in semiconductor device fabrication. The company has a 5,000 square-foot device fabrication and testing facility in West Chicago, Illinois, including a 2000 square-foot Class 1000 clean room. Vega Wave Systems has the complete set of equipment and facilities necessary to develop and manufacture photonic and electronic components. A summary of the equipment includes:

Semiconductor Device Processing

  • Plasma enhanced chemical vapor deposition (PECVD) system for SiNx and SiO2
  • Reactive ion plasma etcher (RIE) capability for both semiconductors and dielectrics
  • Contact mask aligner (1.25μm resolution)
  • Rapid thermal annealing
  • E-beam and Thermal metalization
  • Chemical-mechanical polishing


  • Dicing saw
  • Die attach
  • Wire bonding (wedge, ribbon, and ball)

Process Characterization

  • Scanning electron microscope with EDX
  • Optical microscopes
  • Ellipsometer
  • Profilometer
  • Wire pull testing

Device Characterization

  • Full IV characterization (pA sensitivity)
  • Full LI characterization (pulsed and CW)
  • Optical spectrum analysis
  • Waveguide characterization
  • High speed optical and electrical testing (up to 50GHz)

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